Monday, June 18, 2012
GE2023 FUNDAMENTAL OF NANOSCIENCE Syllabus - Anna University | Regulation 2008 | (Applicable to the students admitted from the Academic year 2008 – 2009 onwards)
GE2023 FUNDAMENTAL OF NANOSCIENCE L T
P C
3 0 0 3
UNIT I INTRODUCTION 10
Nanoscale Science and Technology- Implications for
Physics, Chemistry, Biology and Engineeringlassifications
of nanostructured materials- nano particles- quantum
dots, nanowires-ultra-thinfilmsultilayered
materials. Length Scales involved and effect on
properties: Mechanical, Electronic, ptical,
Magnetic and Thermal properties. Introduction to
properties and motivation for study (qualitative
only).
UNIT II PREPARATION METHODS 5
Bottom-up Synthesis-Top-down Approach: Precipitation,
Mechanical Milling, Colloidal routes, Selfassembly,
Vapour phase deposition, MOCVD, Sputtering, Evaporation,
Molecular Beam Epitaxy,
Atomic Layer Epitaxy, MOMBE.
UNIT III PATTERNING AND LITHOGRAPHY
FOR NANOSCALE DEVICES 5
Introduction to optical/UV electron beam and X-ray
Lithography systems and processes, Wet
etching, dry (Plasma /reactive ion) etching, Etch
resists-dip pen lithography
UNIT IV PREPARATION ENVIRONMENTS 10
Clean rooms: specifications and design, air and water
purity, requirements for particular processes,
Vibration free environments: Services and facilities
required. Working practices, sample cleaning,
Chemical purification, chemical and biological contamination,
Safety issues, flammable and toxic
hazards, biohazards.
UNIT V CHARACTERIZATION TECHNIQUES 10
X-ray diffraction technique, Scanning Electron Microscopy
- environmental techniques, Transmission
Electron Microscopy including high-resolution imaging, Surface
Analysis techniques- AFM, SPM,
STM, SNOM, ESCA, SIMS-Nanoindentation
TOTAL : 45 PERIODS
106
TEXT BOOKS
1. A.S. Edelstein and R.C. Cammearata, eds.,
Nanomaterials: Synthesis, Properties and
Applications, (Institute of Physics Publishing, Bristol
and Philadelphia, 1996)
2. N John Dinardo, Nanoscale charecterisation of surfaces
& Interfaces, Second edition,
Weinheim Cambridge, Wiley-VCH, 2000
REFERENCES
1. G Timp (Editor), Nanotechnology, AIP press/Springer,
1999
2. Akhlesh Lakhtakia (Editor) The Hand Book of Nano
Technology, “Nanometer
Structure”, Theory, Modeling and Simulations.
Prentice-Hall of India (P) Ltd, New
Delhi, 2007.
By Vinoth
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