Wednesday, June 27, 2012
EI2023 MICRO ELECTRO MECHANICAL SYSTEMS Syllabus - EIE 7th Semester - Anna University
EI2023 MICRO ELECTRO MECHANICAL SYSTEMS L T P C
3 0 0 3
AIM
The course is designed to familiarize the student with the functions and applications of MEMS.
(i) To
study about MEMS and parts of MEMS
(ii) To study the design methodalogy of MEMS for
various mechanics.
(iii) To study about actuators in MEMS.
(iv) To study about MEMS based circuits.
(v) To study about optical
and RF based MEMS.
UNIT I INTRODUCTION TO MEMS
9
MEMS and Microsystems, Miniaturization, Typical products, Micro Sensors,Micro actuation, MEMS
with micro actuators, Microaccelorometers and Micro fluidics, MEMS materials, Micro Fabrication
UNIT II MECHANICS FOR MEMS DESIGN
9
Elasticity, Stress, strain and material properties, Bending of thin plates, Spring configurations,
torsional deflection, Mechanical vibration, Resonance, Thermo mechanics – actuators,
force and
response time, Fracture and thin film mechanics, material,
physical vapor deposition (PVD),
chemical mechanical
polishing (CMP)
UNIT III ELECTRO STATIC
DESIGN
9
Electrostatics: basic theory, electro static instability, Surface tension, gap
and
finger pull up, Electro static actuators, Comb generators, gap closers,
rotary motors, inch worms, Electromagnetic actuators, bistable actuators.
UNIT IV
CIRCUIT AND
SYSTEM ISSUES
9
Electronic interfaces, Feed back systems, Noise, Circuit and system
issues,
Case studies
–Capacitive
accelerometer,
Peizo
electric pressure sensor,
Thermal sensors,
radiation sensors, mechanical sensors, bio-chemical
sensors Modeling of MEMS systems, CAD for MEMS.
UNIT V INTRODUCTION TO OPTICAL AND RF MEMS
9
Optical MEMS, system design basics – Gaussian optics, matrix operations, Resolution, Case studies, MEMS scanners and retinal
scanning, display, Digital Micro mirror devices, RF Memes –
design basics, case study – Capacitive RF MEMS switch, Performance issues.
TEXT BOOK:
1. Stephen Santeria, “Microsystems Design “, Kluwer publishers, 2000.
REFERENCES
TOTAL : 45 PERIODS
1. Nadim
Maluf, “ An introduction to Micro electro mechanical system
design”, Artech House, 2000.
2. Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2000
3. Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill,
New Delhi,
2002.
4. Julian w. Gardner, Vijay k. varadan, Osama O.Awadelkarim,micro sensors mems and smart devices, John Wiley & son LTD,2002
5. James J.Allen, micro electro mechanical
system
design, CRC Press published in 2005
By Vinoth
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