GE 2023 FUNDAMENTALS OF NANO SCIENCE Syllabus - Anna University

GE 2023 FUNDAMENTALS OF NANOSCIENCE
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3 0 0 3
UNIT I INTRODUCTION 9
Nanoscale Science and Technology- Implications for Physics, Chemistry, Biology and
Engineering-Classifications of nanostructured materials- nano particles- quantum dots,
nanowires-ultra-thinfilms-multilayered materials. Length Scales involved and effect on
properties: Mechanical, Electronic, Optical, Magnetic and Thermal properties.
Introduction to properties and motivation for study (qualitative only).
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UNIT II PREPARATION METHODS 10
Bottom-up Synthesis-Top-down Approach: Precipitation, Mechanical Milling, Colloidal
routes, Self-assembly, Vapour phase deposition, MOCVD, Sputtering, Evaporation,
Molecular Beam Epitaxy, Atomic Layer Epitaxy, MOMBE.
UNIT III PATTERNING AND LITHOGRAPHY FOR NANOSCALE DEVICES 7
Introduction to optical/UV electron beam and X-ray Lithography systems and processes,
Wet etching, dry (Plasma /reactive ion) etching, Etch resists-dip pen lithography
UNIT IV PREPARATION ENVIRONMENTS 9
Clean rooms: specifications and design, air and water purity, requirements for particular
processes, Vibration free environments: Services and facilities required. Working
practices, sample cleaning, Chemical purification, chemical and biological
contamination, Safety issues, flammable and toxic hazards, biohazards.
UNIT V CHARECTERISATION TECHNIQUES 10
X-ray diffraction technique, Scanning Electron Microscopy - environmental techniques,
Transmission Electron Microscopy including high-resolution imaging, Surface Analysis
techniques- AFM, SPM, STM, SNOM, ESCA, SIMS-Nanoin dentatio n
TOTAL: 45 PERIODS
TEXT BOOKS:
1. A.S. Edelstein and R.C. Cammearata, eds., Nanomaterials: Synthesis, Properties
and Applications, (Institute of Physics Publishing, Bristol and Philadelphia, 1996)
2. N John Dinardo, Nanoscale charecterisation of surfaces & Interfaces, Second
edition, Weinheim Cambridge, Wiley-VCH, 2000
REFERENCES:
1. G Timp (Editor), Nanotechnology, AIP press/Springer, 1999
2. Akhlesh Lakhtakia (Editor) The Hand Book of Nano Technology, “Nanometer
Structure”, Theory, Modeling and Simulations. Prentice-Hall of India (P) Ltd, New
Delhi, 2007.
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